On this paper, The brand new lapping slurry and sprucing slurry are released. As well as the deliquescence diploma of CLBO is fallen to least expensive. A brand new Doing work technology is additionally adopted. After rough sharpening, the concentration of ultra-precision polishing slurry is elevated effectively. So does the ultra-precision sharpening pace, as well as the wiping speed is quicker when compared to the deliquescence pace. The CLBO crystal surface area roughness can attain 1nm and maintain the surface excellent very well. Entry by means of your institution
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The average power on the NIR laser nonetheless has the probable to become improved to tens of watts which include 70 W [26] In the event the double-move configuration could be utilized to the Yb:YAG SCF amplifier stage. As a result, In case the conversion performance of 31% from NIR to DUV may be still taken care of at this bigger electrical power affliction, the typical output electrical power of your DUV laser at 258 nm could possibly be more than 20 W, which would become a amazing power level for the DUV laser and bring about the unanticipated DUV laser machining benefits. Additionally, for prime-ability DUV laser, the UV harm from the nonlinear crystal, including the Home windows for CLBO crystal as well as mirrors, is yet another significant parameter for long run and steady operation.
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Both the 1040 nm and 1078 nm laser come from 1 dual-wavelength Yb-doped fiber laser. Each laser is amplified by levels of fiber amplifier and Yb-doped elements amplifier, respectively.
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While in the scientific and industrial apps, the beam good quality on the DUV laser can be a vital parameter. Notably, the beam top quality from the DUV laser dramatically has an effect on the laser machining effects. The beam good quality in the DUV laser is determined by that of the basic laser as well as the crystal for the frequency conversion. Not long ago, a large-ability DUV laser (>10 W) at 258 nm was claimed using a beam high-quality of M2 < 1.5, which was produced by FHG of the Yb:YAG laser at 1030 nm using the CLBO crystal [13]. This laser would bring about a far better laser machining final result in comparison to the past DUV lasers with bigger M2.
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Moreover, combining the strong-condition laser with other nonlinear course of action such as stimulated Raman scattering, NIR lasers could possibly be reached at new wavelengths with significant ability and high beam high quality, which was examined via the evidence-of-theory experiment. This Raman laser scheme offers a new path to the significant-electricity DUV laser, Specially with the wavelength of 193 nm.
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The conversion effectiveness from fundamental NIR to DUV is from 5% to 36% according to the described results in Desk one. Rising the conversion performance will decrease the stress on the design and setup of the elemental laser amplifier together with the electrical power usage. A fantastic beam high quality of the basic laser will likely lead to your increasing in the conversion effectiveness together with the right ability depth of the NIR and inexperienced laser from CLBO Crystal the SHG and FHG system, respectively. The best conversion efficiencies from NIR to environmentally friendly and inexperienced to DUV laser by utilization of CLBO crystal are 70% and all around 50%, respectively [12], which corresponds into the conversion efficiency of 35% from elementary to DUV.
The event from the 193-nm laser was shown by levels of SFG. As a way to scale the DUV laser ability efficiently, a completely new idea with the 193-nm DUV laser technology is presented determined by the diamond Raman laser.
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